LoPro™ Low-profile, Single-stage, Bellows-sealed Poppet Valves – MKS

HPS® LoPro™ Valves are compact vacuum valves designed for high performance in gauge or system isolation.

• Compact, low profile
• Designed for easy maintenance
• Manual or pneumatic actuation
• Angle and Inline body styles
• Port diameters of 1, 1½, & 2 inches
• KF, CF flanges, or weld stubs
• Multiple seal options

LoPro™ Low-profile Valves are ideally suited for semiconductor manufacturing, process industries, high energy physics research, and thin film deposition.