390 Vacuum Gauge – MKS

390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Module(1×10-9 Torr to Atmosphere)

The MKS, Granville-Phillips® 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM Micro-Ion®/Conductron®/Piezo Vacuum Gauge Module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.