UHV (Ultra-High Vacuum) Valves – MKS

The HPS® UHV Valve (Ultra High Vacuum) is a lightweight compact vacuum valve, fitting easily into vacuum systems where space is tight. Extremely durable and dependable, the UHV Vacuum valve lifetime can extend to 1,000,000 cycles under clean conditions, increasing system uptime. A TIG fusion-welded body made of high grade, corrosion resistant 304 stainless steel has significantly fewer entrapment areas, resulting in less contaminants. Electro-pneumatic control is available for the UHV Valve with the optional air solenoids. In the event of power or air loss, the pneumatic UHV Valve will automatically close.