SEMION Single Sensor – Impedans

SEMION Single Sensor Retarding Field Energy Analyzer

Designed to Measure Ion Flux, Negative Ions, Temperature and Bias Voltage That Drive Your Process.  The Semion Single Sensor is a Retarding Field Energy Analyser (RFEA).  It is placed at any location inside a plasma reactor and measures the energy of ions hitting a surface using a single measurement sensor.