Process Sense™ – MKS

Process Sense™ NDIR Analyzer for Chamber Clean Endpoint Detection

The Process Sense™ endpoint sensor is a small, low cost partial-pressure analyzer specifically designed to determine the completion of plasma chamber cleaning for both semiconductor and flat panel deposition chambers. Process Sense™ is based on infrared absorption, the only technique applicable to all (in-situ and remote) plasma cleaning processes.

Contact the experts at CCR Process Products for more information.