Metal Etch Trap – MKS

The HPS® Metal Etch Trap, when installed as a component in an Effluent Management Subsystem™, efficiently traps condensable effluents that are generated by aluminum etch processes without reducing pumping speed. High trapping capacity means a longer time between maintenance. Maintenance is simplified by replacing a single disposable trapping element rather than cleaning many feet of vacuum line. Low cost of ownership is achieved by not running heated lines all the way to the scrubber.