LoPro™ Low-profile, Single-stage, Bellows-sealed Poppet Valves – MKS
HPS® LoPro™ Valves are compact vacuum valves designed for high performance in gauge or system isolation.
- Compact, low profile
- Designed for easy maintenance
- Manual or pneumatic actuation
- Angle and Inline body styles
- Port diameters of 1, 1½, & 2 inches
- KF, CF flanges, or weld stubs
- Multiple seal options
LoPro™ Low-profile Valves are ideally suited for semiconductor manufacturing, process industries, high energy physics research, and thin film deposition.
