LIQUOZON® PrimO3 – MKS

LIQUOZON® PrimO3 ozone water delivery system delivers ozonated ultra pure water (DIO3) at a pressure of up to 3.7 bargauge (0.37 MPa) and at flow rates of up to 32 L/min, (60 L/min with XF High Flow Option). The LIQUOZON PrimO3 integrated analyzer for dissolved ozone is used for accurate closed loop control of the DIO3 concentration.