E29H Baratron® – MKS

E29H Baratron® Heated Absolute Capacitance Manometer, Etch Sensor

The Baratron® Etch Sensor Manometer is the solution for etch process-induced drift. The RoHS-compliant E29H helps eliminate process byproduct deposits on the surface of the diaphragm, minimizing drift. The E29H Etch Manometer is temperature controlled to either 45°C or 100°C, and includes efficient temperature control electronics to provide superior long-term stability and repeatability. It has an optional external zero input, which accepts a voltage equal to and opposite to the zero offset, to provide a zero output at zero pressure. The optional “At Temperature” LED/switch indicates that the sensor is at the controlled temperature.

The E29H is available in Canada from CCR Process Products.