E28H Baratron® – MKS

E28H Heated, Absolute Capacitance Manometer, Etch Sensor

The Baratron® Etch Sensor Manometer is the solution for etch process-induced drift. The E28H virtually eliminates deposits of process byproducts on the diaphragm, which minimizes drift. The Type E28H Baratron is temperature controlled to 100°C and includes updated temperature control electronics for superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate heater status.

The E28H is available in Canada from CCR Process Products.