C-Series Mass Flow Controller – MKS
C-Series Elastomer-sealed, Digital Mass Flow Controller
The C-Series digitally-controlled mass flow controller is available with either RS485 or Analog I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 100 milliseconds. Digital calibration yields 0.8% of setpoint accuracy on the calibration gas.
Contact CCR Process Products for help in establishing the configuration to suit your specific application.
