BlueBox Input/Output Interface – MKS

BlueBox Data Collection and Tool Interface

The BlueBox provides the optimum solution for data integration and data sharing. Designed to manage and segment data requests from multiple users, the BlueBox multiplexes the data from the process tool and sensors and communicates this data to the multiple applications and users, including the factory host. The open and flexible architecture of the BlueBox guarantees easy integration into existing fab environments, using SECS/HSMS and XML protocols.

Available in Canada from CCR Process Products.