AA02A Baratron® – MKS

a-Baratron® Heated Absolute Capacitance Manometer

The MKS a-Baratron® manometer is an advanced high-performance absolute heated capacitance manometer developed specifically for use in vacuum and pressure measurement applications where high accuracy and excellent repeatability are crucial to process success. These capacitance manometers are internally heated to 45°, 80°, or 100°C. They use state-of-the-art digital architecture throughout to produce the highest possible long-term performance and reliability. They can be equipped with either the standard sensor or MKS’ patented Etch Baffle sensor technology that greatly reduces process contamination, and they can be configured for both new and existing processing systems. These manometers operate on ±15VDC input voltage, and have a standard 0 – 10VDC analog output signal. Full Scale measurement ranges from 0.1 Torr (13.3 Pa) to 1000 Torr (133.3 kPa) are available. The a-Baratron manometer is fully CE and RoHS (Restriction of Hazardous Substances) compliant.

The a-Baratron® replaces the 627D, 628D, E27D, and E28D Baratrons. The experts at CCR Process Products can help you determine your needs for  your specific applications.