πPC PC99 Integrated Pressure Controller with Mass Flow Meter – MKS

The πPC with Integral MFM (PC99) provides pressure measurement and control while monitoring mass flow rates for critical process applications such as backside wafer pressure control and process gas panel pressure balancing. This is accomplished in a compact package that saves critical space when compared to the previous multicomponent systems necessary to accomplish the task.

The PC99 utilizes MKS Instruments’ leading Baratron capacitance manometer technology for pressure measurement and patented thermal flow meter to monitor gas mass flow. Both are integrated along with a proportioning control valve and the latest in control electronics providing fast and accurate pressure control with critical flow monitoring as a system diagnostic. The PC99 can be configured to be capable of controlling pressures as low as 2 torr; critical to backside wafer pressure control or as high as 100 psia for process gas pressure control. The valve and flow meter can be configured for full scale flow rates from 10 sccm to 30 slm depending on process conditions.

The PC99 is available with either digital (DeviceNet or RS-485) or analog I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device’s standard Ethernet user interface accessible via virtually any PC with a web browser. The PC99’s bright, 4 digit rotatable display provides easy viewing of the device’s IP address as well as process pressure, flow, and temperature.