RPDG-200 DC Plasma Generator – MKS

RPDG-200 20kW Pulsed DC Plasma Generator

RPDG-200 is a 20,000W Asymmetric Bipolar Pulsed DC system that enables deposition of a wide variety of low defect insulating films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN. The system is comprised of a pulse master unit driving a 20kW DC slave providing up to 20kW in a single output.

This product is obsolete and there are no planned replacements from MKS.