631D Baratron® – MKS

631D Baratron® Heated Absolute Capacitance Manometer

The Baratron® 631D is the RoHS-compliant version of the high temperature capacitance manometer that MKS Instruments introduced more than 10 years ago. These devices operate at very high internal temperatures that minimize the deposition of process byproducts within the sensor, which nearly eliminates output drift caused by such contamination. Its available operating temperatures are 150°C or 200°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). Its new packaging reduces the amount of installation space needed by at least 40%, making it even easier to design into new systems or retrofit into existing equipment.

The 631D is available in Canada from CCR Process Products.