LoPro Two-Stage Compact Vacuum Soft-Start Valves – MKS
LoPro™ 2-Stage valves are low-profile isolation valves with an integrated small bypass valve that significantly simplifies system setup and reduces costs. The integrated slow pumpdown feature reduces particle contamination and damage.
- Compact design
- Adjustable conductance for variable pumpdown speed
- Eliminates the need for small bypass lines
- Angle and Inline body styles
- Port diameters of 1, 1½, & 2 inches
- KF, CF flanges, or weld stubs
- Multiple seal options
LoPro™ Two-stage Low-profile Valves are best suited for high vacuum applications, specifically semiconductor or optical processing where a cleaner environment is necessary.
