OPT-400 DC Plasma Generator – MKS

OPT-400 40kW DC Plasma Generator

Today’s advanced sputtering processes require speed, control, accuracy, improved reliability and sophisticated arc management. Building on the production-proven DCG series, the Optima® is the next generation of MKS high performance DC Plasma power supply systems for Physical Vapor Deposition (PVD) processes.

MKS Optima® DC generators meet the demanding power requirements for a variety of thin film applications including; semiconductor, data storage, solar cell and industrial coatings.

This product is obsolete and there are no planned replacements from MKS.