626D Baratron® – MKS

626D Baratron® Absolute Capacitance Manometer

The Baratron® 626D ambient temperature capacitance manometer is the latest of MKS’ analog RoHS-compliant, capacitance-based, high-performance vacuum and pressure transducers. It requires ±15VDC input voltage and provides a high-level 0-10VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signal-conditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system.

The 626D is available in Canada from CCR Process Products.