P4B Mass Flow Controller – MKS

P4B πMFC Multi-gas, Multi-range, Programmable, Metal-sealed, Digital Mass Flow Controller

The πMFC, model P4B, is the next generation of MKS multi-gas/multi-range MFC for critical process gas flow control. The device uses the latest in electronics and valve components enabling it to meet the most critical of process gas flow control requirements. The performance capabilities of the P4B are quickly apparent where short process steps are required given the sub 500 millisecond control times and accuracy to within 1% of setpoint. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6. The P4B is a true multi-range/multi-gas MFC that enables the user to have confidence in this device’s capability and minimize MFC inventory requirements.

The P4B is available in Canada from CCR Process Products.