142A Baratron® – MKS

142A Baratron® Absolute Heated Vacuum Switch, Temperature Controlled to 100°C

The MKS Instruments 142A Absolute Ambient Pressure/Vacuum Switch offers fast, accurate, and reliable protection for vacuum equipment and processes. The 142 is a heated (100°C) manometer designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. The 142A has relay outputs that are easily interfaced with alarms, valve actuators, computers, process controllers, and other protection devices.

The 142A is available in Canada from CCR Process Products.